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Achieving excellent temperature distribution and stability.
The adoption of embedded heating elements has achieved excellent average temperature distribution and stability. It is mainly used for heating and maintaining the temperature of research liquids.
Energy-saving and compact design, heats up to 1,000℃ instantly! Rust-free atmosphere hot plate with quartz plate.
Good news for those struggling with low temperatures and oxidation issues using commercial hot plates (atmospheric furnaces)! 【Features】 - A hot plate that can instantly heat up to 1000°C and allows for the introduction of atmospheric gas - An atmospheric hot plate made of quartz that can withstand 1000°C - Excellent heat uniformity due to high-purity quartz plate and shot processing - Equipped with a high-precision program controller compatible with PC communication, allowing for precise temperature adjustment and control
Compact yet high-performance. Compatible with a wide range of processes.
The performance of the hot plate is a crucial factor that determines the accuracy of the photolithography process. In particular, in advanced processes that require high uniformity of film thickness, line width, and film quality, as well as in process development involving materials with high temperature dependence, the performance of the hot plate becomes a significant factor in assessing process performance. The timer-controlled pin-up mechanism enables precise time management, allowing for uniform thermal treatment between wafers. In addition to the standard 250°C model, a high-temperature 350°C model is also available. Furthermore, if uniform cooling is required before and after processing, a tabletop cool plate can also be utilized. 【Features】 ■ High precision in in-plane temperature uniformity. ■ Timer control reduces wafer-to-wafer variation. ■ Compatible with 3 to 8-inch wafers. ■ Proximity balls ensure a uniform gap. ■ The high-temperature 350°C model is equipped with a burn prevention cover. ■ Tabletop cool plates with air cooling and water cooling are also available. *For more details, please refer to the PDF materials or feel free to contact us.
